| Measuring Range (X×Y×Z) | 150×100×150 mm | 250×150×150 mm | 300×200×150 mm | 400×300×150 mm |
| Stage Size | 354×228 mm | 450×280 mm | 500×330 mm | 606×466 mm |
| Glass Stage Size | 210×160 mm | 306×196 mm | 350×250 mm | 450×350 mm |
| Resolution of X/Y/Z Axis | 0.5 µm | 0.5 µm | 0.5 µm | 0.5 µm |
| Accuracy of X/Y Axis | $\le(3.5+L/100)\ \mu\text{m}$ ($L$ is the measuring length in mm) | $\le(3.5+L/100)\ \mu\text{m}$ ($L$ is the measuring length in mm) | $\le(3.5+L/100)\ \mu\text{m}$ ($L$ is the measuring length in mm) | $\le(3.5+L/100)\ \mu\text{m}$ ($L$ is the measuring length in mm) |
| Repeatability of X/Y Axis | 2 µm | 2 µm | 2 µm | 2 µm |
| Objective Lens | 0.7X~4.5X (Zoom) | 0.7X~4.5X (Zoom) | 0.7X~4.5X (Zoom) | 0.7X~4.5X (Zoom) |
| Working Distance | 92 mm | 92 mm | 92 mm | 92 mm |
| Magnification | 33X~195X (on 19" monitor) | 33X~195X (on 19" monitor) | 33X~195X (on 19" monitor) | 33X~195X (on 19" monitor) |
| Camera | 1/3" color CCD, 0.3M pixel | 1/3" color CCD, 0.3M pixel | 1/3" color CCD, 0.3M pixel | 1/3" color CCD, 0.3M pixel |
| Illumination | Surface and contour with adjustable LED | Surface and contour with adjustable LED | Surface and contour with adjustable LED | Surface and contour with adjustable LED |
| Max. Height of Workpiece | 150 mm (Note: Specific table rows state 105 mm) | 150 mm (Note: Specific table rows state 105 mm) | 150 mm (Note: Specific table rows state 105 mm) | 150 mm (Note: Specific table rows state 105 mm) |
| Max. Weight of Workpiece | 20 kg | 20 kg | 20 kg | 20 kg |
| Operation System | Windows 7 / 8 / 10 | Windows 7 / 8 / 10 | Windows 7 / 8 / 10 | Windows 7 / 8 / 10 |
| Drive Method | Manual | Manual | Manual | Manual |
| Power Supply | 110/220V, 50/60Hz | 110/220V, 50/60Hz | 110/220V, 50/60Hz | 110/220V, 50/60Hz |
| Dimension (L×W×H) | 560×540×850 mm | 760×600×900 mm | 760×600×900 mm | 970×670×940 mm |
| Weight | 100 kg | 120 kg | 140 kg | 240 kg |
